| Optical readout uncooled infrared imaging detector using knife-edge filter operation |
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| 作者单位： | ZHANG Q（Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei 230027, China） ;
MIAO Z（Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei 230027, China） ;
GUO Z（Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei 230027, China） ;
DONG F（Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei 230027, China） ;
XIONG Z（Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei 230027, China） ;
WU X（Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei 230027, China） ;
CHEN D（Institute of Microelectronics Chinese Academy of Science, Beijing 100029, China） ;
LI C（Institute of Microelectronics Chinese Academy of Science, Beijing 100029, China） ;
JIAO B（Institute of Microelectronics Chinese Academy of Science, Beijing 100029, China） ; |
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| 基金项目： | 国家自然科学基金;国家重点基础研究发展计划(973计划) |
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| 摘 要： | An optical readout uncooled infrared (IR) imaging detector of bimaterial cantilever array using knife-edge filter operation (KEFO) is demonstrated. The angle change of each cantilever in a focal plane array (FPA) can be simultaneously detected with a resolution of 10-5 degree. A deformation magnifying substrate-free micro-cantilever unit with multi-fold interval metallized legs is specially designed and modeled. A FPA with 160×160 pixels is fabricated and thermal images with noise equivalent temperature difference (NETD) of 400 mK are obtained by this imaging detector.
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| 关 键 词： | 光学读出 非制冷红外成象探测器 刀口滤波器运算 设计 模型 |
| 文章编号： | 1673-1905（2007）02-0119-04 |
| 收稿时间： | 9 January 2007 |
Optical readout uncooled infrared imaging detector using knife-edge filter operation |
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| Authors: | Zhang Q Miao Z Guo Z Dong F Xiong Z Wu X Chen D Li C and Jiao B |
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| Affiliation: | (1) Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei, 230027, China;(2) Institute of Microelectronics Chinese Academy of Science, Beijing, 100029, China |
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| Abstract: | An optical readout uncooled infrared (IR) imaging detector of bimaterial cantilever array using knife-edge filter operation(KEFO) is demonstrated. The angle change of each cantilever in a focal plane array (FPA) can be simultaneously detected with a resolution of 10-5 degree. A deformation magnifying substrate-free micro-cantilever unit with multi-fold interval metallized legs is specially designed and modeled. A FPA with 160× 160 pixels is fabricated and thermal images with noise equivalent temperature difference (NETD) of 400 mK are obtained by this imaging detector. |
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| Keywords: | TP206+ 1 |
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