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Effects of parameters on the performance of amorphous IGZO thin films prepared by RF magnetron sputtering |
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| Authors: | Jian-wen Niu Rui-xin Ma Yuan-yuan Wang Shi-na Li Shi-yao Cheng Zi-lin Liu |
| Affiliation: | [1]School of Metallurgical and Ecological Engineering, University of Science and Technology Beijing, Beo'ing 100083, China; [2]Belting Key Lab. of Green Recycling and Extraction of Metals, University of Science and Technology Beijing, Bei-ring 100083, China |
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