| Novel fiber-optical interferometer with miniaturized probe for in-hole measurements |
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| 作者单位： | Fraunhofer Institute for Production Technology (IPT) Steinbachstrasse 17 52074 Aachen Germany，Fraunhofer Institute for Production Technology (IPT) Steinbachstrasse 17 52074 Aachen Germany，Fraunhofer Institute for Production Technology (IPT) Steinbachstrasse 17 52074 Aachen Germany，Fraunhofer Institute for Production Technology (IPT) Steinbachstrasse 17 52074 Aachen Germany |
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| 基金项目： | Anemg GZ 398,Chinesisch-Deutsches Zentrum f(u)it Wissenschaftsf(o)rdcrung. |
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| 摘 要： | Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.
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| 关 键 词： | 纤维 光干扰术 光检测技术 测量方法 |
| 文章编号： | 1673-1905（2008）02-0140-3 |
| 收稿时间： | 21 August 2007 |
Novel fiber-optical interferometer with miniaturized probe for in-hole measurements |
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| Authors: | Robert Schmitt Tilo Pfeifer Frank Depiereux and Niels K?nig |
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| Affiliation: | (1) Fraunhofer Institute for Production Technology (IPT), Steinbachstrasse 17, 52074 Aachen, Germany |
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| Abstract: | Today,micro-system technology and the development of new MEMS(Micro-Eleetro-Mechanical Systems)ate emerging rapidly.In order for this development to become a SUCCESS in the long run,measurement systems have to ensure product quality.Most often,MEMS have to be tested by means of functionality or destructive tests.One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities.We present a measurement system that could be used for these kinds of measurements.The system combines a fiber optical,miniaturized sensing probe with low-coherence intcrferometry,so that absolute distance measurements with nanometcr accuracy are possible. |
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| Keywords: | measurements probes interferometer absolute distance accuracy measurement system fiber optical present reason sensing available used features like small cavities means product quality |
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