| 提高差拍法布里-珀罗干涉仪测量精度的研究 |
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| 引用本文： | 孙文科,许婕,殷纯永,李岩.提高差拍法布里-珀罗干涉仪测量精度的研究[J].激光与红外,2006,36(4):288-291. |
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| 作者姓名： | 孙文科 许婕 殷纯永 李岩 |
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| 作者单位： | 1. 清华大学精密仪器与机械学系,精密测试技术与仪器国家重点实验室,北京,100084
2. 中国计量科学研究院,北京,100013 |
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| 基金项目： | 教育部科学技术研究项目 |
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| 摘 要： | 文章在中国计量科学研究院研制的差拍法布里-珀罗（F-P）干涉仪基础上，提出用密封干涉光路的真空系统方法，来消除空气折射率变化对测量结果的影响。研究了空气折射率变化对测量精度的影响关系，给出真空系统所需的真空度的估计式。并设计制作了适用于该系统的密封干涉光路的真空系统。
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| 关 键 词： | 纳米测量 法布里-珀罗腔 拍频干涉法 空气折射率 |
| 文章编号： | 1001-5078（2006）04-0288-04 |
| 收稿时间： | 2005-08-03 |
| 修稿时间： | 2005-08-03 |
The Study of Improving on Measured Precision of Heterodyne Fabry-Parot Interferometer |
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| SUN Wen-ke,XU Jie,YIN Chun-yong,LI Yan.The Study of Improving on Measured Precision of Heterodyne Fabry-Parot Interferometer[J].Laser & Infrared,2006,36(4):288-291. |
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| Authors: | SUN Wen-ke XU Jie YIN Chun-yong LI Yan |
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| Affiliation: | 1. Department of Precision Instrument, Tsinghua University State Key Laboratory of Precision Measurement Technology and Instruments, Beijing 100084, China ;2. National Institute of Metrology P. R. China, Beijing 100013, China |
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| Abstract: | In this paper,a novel way based on NIM's heterodyne Fabry-Perot interferometer was put forward to avoid the effect of the change of air refractive index by airproofing the interference light path in vacuum.The influence of the change of air refractive index to the measured precision was studied,and the approximate formula of vacuum degree that vacuum system required was concluded.The vacuum system that adjusts the interference light path was designed and built. |
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| Keywords: | nanometer measurement Fabry-Perot cavity beat frequency interferometry air refractive index |
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