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半导体激光器在氧气探测中的应用及关键技术
引用本文:刘云燕,潘教青,程传福,于红艳.半导体激光器在氧气探测中的应用及关键技术[J].激光与红外,2011,41(5):501-505.
作者姓名:刘云燕  潘教青  程传福  于红艳
作者单位:1. 山东理工大学理学院,山东淄博,255049
2. 中国科学院半导体研究所,北京,100083
3. 山东师范大学物理与电子科学学院,山东济南,250014
摘    要:氧气探测在工业、医疗等诸行业都有重要意义。本文简述了近几年发展起来的TD-LAS技术之特点及优势,评述了各种半导体激光器作为激发光源用于TDLAS技术进行氧气探测的性能,着重讨论了在氧气探测方面具有发展前景和竞争优势的DFB和VCSEL结构激光器光源的应用和进展。

关 键 词:半导体激光器  氧探测  可调谐二极管激光吸收光谱(TDLAS)  DFB  VCSEL  

Application and key technologies of semiconductor laser in the detection of oxygen
LIU Yun-yan,PAN Jiao-qing,CHENG Chuan-fu,YU Hong-yan.Application and key technologies of semiconductor laser in the detection of oxygen[J].Laser & Infrared,2011,41(5):501-505.
Authors:LIU Yun-yan  PAN Jiao-qing  CHENG Chuan-fu  YU Hong-yan
Affiliation:LIU Yun-yan1,PAN Jiao-qing2,CHENG Chuan-fu3,YU Hong-yan2(1.School of Science,Shandong University of Technology,Zibo 255049,China,2.Institute of Semiconductors CAS,Beijing 100083,3.College of Physics and Electronics,Shandong Normal University,Jinan 250014,China)
Abstract:In many industrial and medical fields,oxygen probe is important.This paper briefly discussed the features and advantages of TDLAS technique developed in recent years,reviewed the performance of different kinds of semiconductor lasers as irradiance source for the TDLAS technology in the oxygen probe.The application and progress of DFB and VCSEL structure semiconductor lasers which are considered as the competitive irradiance sources for detection of oxygen are focused on.
Keywords:semiconductor laser  oxygen detection  TDLAS  DFB  VCSEL  
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