面向MEMS红外光源的辐射增强结构设计

针对常规TO封装下红外光源辐射量在一定光程下严重衰减的不足,基于自研的MEMS红外光源结构,提出了用于红外辐射增强的反射镜及用于光束准直的透镜封装结构,以期大幅提高光源有效辐射效率。本文基于Zemax软件对红外光源在光路中的辐射特性进行了模拟仿真。仿真结果表明:红外光源放置于9.52 mm口径、9.41 mm深度的抛物面反射镜的焦点位置,辐射能量提高了15.5倍；采用2.2 mm厚的BaF2材料的双凸曲面辐射透镜,红外光线呈准直收敛辐射,辐射效率最大可以达到27.42%。本工作研究成果为红外光学气体传感器光源提供了合理的红外辐射增强结构尺寸参数,有效提高了系统的稳定性和光源的辐射效率。

Design of radiation enhancement structure for MEMS infrared source

As the infrared radiation seriously attenuated in a certain optical length for the traditional TO package of MEMS infrared source,based on the developed MEMS IR source,packaged structures of reflector for radiation enhancement and lens for beam collimation are designed to improve radiation efficiency significantly.The radiation property of IR source in the optical path is simulated based on Zemax.The simulation results show that and the radiation energy increased by 15.5 times when the IR source is placed in the focus position of parabolic reflector with 9.52 mm caliber,9.41 mm depth.With the usage of 2.2 mm double convex surface lens of BaF2,the IR light is collimated convergent radiation,and the radiation efficiency can reach a maximum of 27.42%.The results provide optimal radiation enhancement structural parameters for infrared optical gas sensors,which can improve the stability of whole system and radiation efficiency of MEMS IR source.