| 中波10 μm小间距原位集成微透镜技术 |
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| 引用本文： | 刘世光,徐碧婷,徐长彬,张轶.中波10 μm小间距原位集成微透镜技术[J].激光与红外,2021,51(3):339-342. |
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| 作者姓名： | 刘世光 徐碧婷 徐长彬 张轶 |
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| 作者单位： | 华北光电技术研究所,北京 100015 |
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| 摘 要： | 原位集成微透镜能够在不改变封装结构的情况下,实现对入射光的汇聚效果,有效提升信号并降低串音,对于中波10μm小间距碲镉汞焦平面探测器的性能提升具有重要意义。本文设计并制备出了10μm小间距原位集成微透镜,成功实现了信号增强效果,器件的噪声等效温差(NETD)得到有效降低。
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| 关 键 词： | 碲镉汞 中波 小间距 微透镜 |
In-situ integrated microlens on small pixel(10μm)mid-wave IRFPA |
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| LIU Shi-guang,XU Bi-ting,XU Chang-bin,ZHANG Yi.In-situ integrated microlens on small pixel(10μm)mid-wave IRFPA[J].Laser & Infrared,2021,51(3):339-342. |
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| Authors: | LIU Shi-guang XU Bi-ting XU Chang-bin ZHANG Yi |
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| Affiliation: | North China Research Institute of Electro-Optics,Beijing 100015,China |
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| Abstract: | In-situ integrated microlens could concentrate the illuminated infrared light without changing the packaging structure.By fabricating in-situ integrated microlens on the illumination side of the Inferred Focal Plane Array(IRFPA),signal is increased,and the crosstalk is suppressed,which has a significant meaning to improve the performance of the small pixel(10μm)HgCdTe IRFPA.Microlens for the small pixel(10μm)has been carefully designed and successfully fabricated in the paper.The signal bas been effectively increased,and the noise equivalent temperature difference(NETD)has been decreased. |
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| Keywords: | HgCdTe mid-wave small pixel microlens |
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