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增黏剂(HMDS)在锑化铟光刻工艺中的应用
引用本文:郭喜.增黏剂(HMDS)在锑化铟光刻工艺中的应用[J].激光与红外,2008,38(8):789-791.
作者姓名:郭喜
作者单位:华北光电技术研究所,北京,100015
摘    要:介绍了增黏剂(HMDS)的物化性质及其在光刻工艺中的作用,并且通过实验研究将增黏剂应用于锑化铟材料的光刻工艺,改善了锑化铟的表面状态,增强了锑化铟衬底与光刻胶的黏附性,进而在湿法腐蚀等后续工艺中提高了光刻胶的抗腐蚀性.

关 键 词:增黏剂(HMDS)  锑化铟  光刻工艺  光刻胶  黏附性  抗腐蚀性

Application of HMDS in the Lithography Technology of InSb
GUO Xi.Application of HMDS in the Lithography Technology of InSb[J].Laser & Infrared,2008,38(8):789-791.
Authors:GUO Xi
Affiliation:North China Research Institute of Electro-optics,Beijing 100015,China
Abstract:The characteristic and the application in lithography technology of the adherence promoter(HMDS) was introduced in this paper.Through the experiment,HMDS had been applied in the lithography technology of InSb,it changed the InSb surface and enhanced the adherence between InSb and photoresist.Consequently,the corrosion resistance of photoresist was increased in the next wet etching etc process.
Keywords:
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