| 灵敏度可调的光学读出非制冷热像元设计 |
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| 引用本文： | 周玉修,程融,刘坚强,曾玮,孙光厚,李铁.灵敏度可调的光学读出非制冷热像元设计[J].激光与红外,2015,45(2):158-162. |
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| 作者姓名： | 周玉修 程融 刘坚强 曾玮 孙光厚 李铁 |
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| 作者单位： | 九江学院理学院,江西 九江 332005;中国科学院上海微系统与信息技术研究所 传感技术联合国家重点实验室,上海 200050 |
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| 基金项目： | 国家自然科学基金（No.11264021）;江西省青年科学基金（No.20132BAB216011）;九江学院科研项目（No.2013KJ16）资助 |
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| 摘 要： | 设计了一种可见光反射型光学读出非制冷热像元结构。理论分析表明热像元的热-机械灵敏度达到0.043deg·K-1,在热像元面积比已有报道减小75%的情况下,热-机械灵敏度反而提高至少79%。通过改变弯折梁底层金膜的面积来调节热像元的灵敏度,使其可在2.36×10-6rad·m2·W-1和9.21×10-6rad·m2·W-1之间变化。ANSYS仿真结果和理论结果吻合较好,验证了设计的正确性。
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| 关 键 词： | 成像系统 非制冷红外热像元 光学读出 灵敏度 响应时间 |
Design of optical-readout uncooled thermal imaging pixel with adjustable sensitivity |
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| ZHOU Yu-xiu,CHENG Rong,LIU Jian-qiang,ZENG Wei,SUN Guang-hou,LI Tie.Design of optical-readout uncooled thermal imaging pixel with adjustable sensitivity[J].Laser & Infrared,2015,45(2):158-162. |
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| Authors: | ZHOU Yu-xiu CHENG Rong LIU Jian-qiang ZENG Wei SUN Guang-hou LI Tie |
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| Affiliation: | Department of Science,Jiujiang University,Jiujiang 332005,China;State Key laboratories of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China |
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| Abstract: | A design of optical readout uncooled thermal imaging pixel is proposed. The theoretical analysis shows that,thermal-mechanical sensitivity reaches 0.043 deg·K-1 and increases by 79% at least when the pixel size decreased by 75% compared with reported ones. Sensitivity can be adjusted from 2.36×10-6 rad·m2·W-1 to 9.21×10-6 rad·m2·W-1 by changing the size of the bottom gold layer on the folded cantilever. Finite element simulations by ANSYS are in good agreement with theoretical results,which verifies the validity of the design. |
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| Keywords: | imaging systems uncooled thermal imaging pixel optical readout sensitivity response time |
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