| 双频激光干涉仪技术现状与发展 |
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| 引用本文： | 所睿,范志军,李岩,张书练.双频激光干涉仪技术现状与发展[J].激光与红外,2004,34(4):251-253. |
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| 作者姓名： | 所睿 范志军 李岩 张书练 |
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| 作者单位： | 清华大学,精密仪器与机械学系,精密测试技术与仪器国家重点实验室,北京,100084 |
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| 摘 要： | 文章概述了国内外双频激光干涉仪产品的现状，介绍了近年来双频激光干涉仪向高分辨率、高精度、高测速等几个方向的发展趋势。
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| 关 键 词： | 双频激光干涉仪 外差干涉 分辨率 发展趋势 |
| 文章编号： | 1001-5078(2004)04-0251-03 |
Dual-frequency Laser Interferometer Present State and Development |
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| SUO Rui,FAN Zhi-jun,LI Yan,ZHANG Shu-lian.Dual-frequency Laser Interferometer Present State and Development[J].Laser & Infrared,2004,34(4):251-253. |
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| Authors: | SUO Rui FAN Zhi-jun LI Yan ZHANG Shu-lian |
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| Abstract: | The present state of the dual-frequency laser interferometer in the world is introduced in brief.The trends of development to high resolution,high accuracy,high measurement speed etc.are given. |
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| Keywords: | dual-frequency laser interferometer heterodyne interferometer high resolution high accaracy high measurment speed |
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