| MEMS摆镜在小型化激光成像雷达中的应用 |
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| 引用本文： | 张驰,岳娟,徐正平,葛军.MEMS摆镜在小型化激光成像雷达中的应用[J].激光与红外,2017,47(9):1149-1153. |
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| 作者姓名： | 张驰 岳娟 徐正平 葛军 |
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| 作者单位： | 中国科学院红外探测与成像技术重点实验室,中科院上海技术物理研究所,上海 200083;中国科学院长春光学精密机械与物理研究所,吉林 长春 130033 |
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| 摘 要： | 研究了MEMS摆镜在未来小型化激光成像雷达的系统中的应用。首先介绍了MEMS摆镜自身的器件特性,结合脉冲成像激光雷达的应用背景,分析了系统设计时要注意的问题。进一步设计了MEMS摆镜的驱动模块,通过仿真和成像验证了李萨如扫描图形的应用。
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| 关 键 词： | MEMS摆镜 激光成像雷达 光学镀膜 李萨如扫描 |
Application of MEMS mirror in compact laser imaging radar |
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| ZHANG Chi,YUE Juan,XU Zheng-ping,GE Jun.Application of MEMS mirror in compact laser imaging radar[J].Laser & Infrared,2017,47(9):1149-1153. |
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| Authors: | ZHANG Chi YUE Juan XU Zheng-ping GE Jun |
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| Affiliation: | Key Laboratory of Infrared System Detection and Imaging Technology,Institute of Technical Physics of Chinese Academy of Sciences,Shanghai 200083,China;Changchun Institute of Optics Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China |
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| Abstract: | The application of MEMS mirror in the future compact laser imaging radar system was studied.Firstly,the features of MEMS mirror were introduced.Considering the application background of pulse laser imaging radar,the concerned problems in designing the system were analyzed.And then the driving module of MEMS mirror was designed.At last,the application of Lissajous scanning pattern is verified by simulation and imaging. |
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| Keywords: | MEMS mirrors laser imaging radar optical coating Lissajous scanning pattern |
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