| 长线列碲镉汞红外焦平面微型杜瓦的研究 |
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| 引用本文： | 王小坤,朱三根,龚海梅.长线列碲镉汞红外焦平面微型杜瓦的研究[J].激光与红外,2006,36(11):1047-1050. |
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| 作者姓名： | 王小坤 朱三根 龚海梅 |
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| 作者单位： | 中国科学院上海技术物理研究所传感技术国家重点实验室,上海,200083 |
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| 基金项目： | 致谢：特别感谢李向阳研究员的指导以及张亚妮、曾智江、刘向阳等同志认真、细致的工作. |
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| 摘 要： | 针对长线列碲镉汞红外焦平面探测器封装的特点，文章讨论了分置式微型杜瓦研制的难点。在用于封装2000元碲镉汞焦平面芯片的分置式微型杜瓦研制中，详细阐明了一种焦平面芯片其装载面为斜拉式支撑结构的设计，实现了探测器外引功能线的布线优化及其输出引线工艺改进，并提出了一种大尺寸高气密光学窗口的焊接方法等关键技术。通过这些关键技术的突破，成功研制出了2000元碲镉汞焦平面探测器杜瓦组件。
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| 关 键 词： | 分置式金属杜瓦 红外焦平面探测器 碲镉汞 |
| 文章编号： | 1001-5078（2006）11-1047-04 |
| 收稿时间： | 2006-08-20 |
| 修稿时间： | 2006-08-20 |
The Study of the Micro Dewar for Long Linear HgCdTe IRFPA |
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| WANG Xiao-kun,ZHU San-gen,GONG Hai-mei.The Study of the Micro Dewar for Long Linear HgCdTe IRFPA[J].Laser & Infrared,2006,36(11):1047-1050. |
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| Authors: | WANG Xiao-kun ZHU San-gen GONG Hai-mei |
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| Affiliation: | State Key Laboratories of Transducer Technology, Shanghai Institute of technical Physics, Chinese Academy of Sciences, Shanghai 200083 ,China |
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| Abstract: | According to package characteristics of long linear HgCdTe IRFPA detector,difficulties of the metal split micro dewar manufacture are discussed in the paper.During the course of the manufacture for packaging 2000 pixel HgCdTe IRFPA wafer,some crucial techniques are solved,such as the design of the button stem structures with inclined dragging wires applied in cryogenic platform,the optimization of long linear IRFPA detector's signal wires layouts,the implement of a fanout board having thin film gold metalization for defining the required electrical conductors and a method of hermetically sealed vacuum enclosure of large dimension windows,etc.The research and development of packaging technics are important to advance application of long linear IRFPA detector. |
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| Keywords: | split metal dewar IRFPA detector HgCdTe |
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