声表面波陀螺仪研究进展

高精度的惯性导航系统是水下航行器顺利完成水下作业的关键之一，陀螺仪作为一种重要的惯性敏感元件，是构成惯性导航系统的基础核心器件。基于声表面波陀螺效应的新型陀螺仪具有优良的抗振能力、良好的可靠性与稳定性等特点而引起人们的浓厚兴趣，在大冲击等恶劣环境具有良好的应用前景。本文对声表面波陀螺仪的研究进展进行回顾，特别介绍了一种设置金属点阵的陀螺效应增强模式SAW陀螺仪。该结构由在同一压电晶体上反向设置的两个SAW传感器件构成，在其叉指换能器中间分布有金属点阵。结合层状介质中声波传输特性的研究方法对压电晶体及金属点阵参数对传感器响应特性的影响进行建模分析，设计并实验研制了工作频率为30MHz、80MHz及95MHz的SAW陀螺仪。实验结果表明，该结构陀螺仪实现了良好的温度补偿特性，并通过在SAW传播路径上合理设置的金属点阵，大幅提升了传感器的检测灵敏度。 

Research Progress of Surface Acoustic Wave Gyroscope

High-precision inertial navigation system is one of the keys for underwater vehicles to successfully complete underwater operations. As an important inertial sensing element, gyroscope is the basic core component of inertial navigation system. The gyroscope based on the surface acoustic wave (SAW) gyroscopic effect has attracted great interest due to its excellent vibration resistance, good reliability and stability, and has a good application prospect in harsh environments. In this paper, the research progress of SAW gyroscope is reviewed, especially the gyroscope with metallic dot array is introduced. The structure consists of two SAW sensor elements placed in opposite directions on the same piezoelectric crystal, and metallic dot array is distributed in the middle of the interdigital transducer. Combined with the research method of acoustic wave transmission characteristics in layered medium, the influence of piezoelectric crystal and metallic dot array on the response characteristics of the sensor was modeled and analyzed. Then SAW gyroscopes with working frequency of 30MHz, 80MHz and 95MHz were designed and developed. The experimental results show that the gyroscope achieves good temperature compensation characteristics, and the detection sensitivity of the sensor is greatly improved by the metallic dot array which is reasonably set on the SAW propagation path.