| Si和Si尖上纳米金刚石场电子发射性质的研究 |
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| 引用本文： | 廖克俊,王万录,吕建伟,孙晓楠,王蜀霞.Si和Si尖上纳米金刚石场电子发射性质的研究[J].光电子技术,2003,23(4):218-220. |
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| 作者姓名： | 廖克俊 王万录 吕建伟 孙晓楠 王蜀霞 |
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| 作者单位： | 重庆大学应用物理系,教育部光电技术和系统重点实验室,重庆,400044 |
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| 基金项目： | 国家自然科学基金资助项目 ( No.50 0 50 2 7) |
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| 摘 要： | 研究了Si和Si尖上纳米金刚石场电子发射性质。纳米金刚石是利用热灯丝CVD法合成的，反应气体是CH4、N2和H2的混合物。实验结果表明Si衬底上的纳米金刚石特别是Si尖上的金刚石与多晶金刚石相比，前者极大地改善了场发射性质。场发射电场阈值和电流与金刚石晶粒度密切相关。文中对其结果进行了讨论。
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| 关 键 词： | 纳米金刚石 场电子发射 Si尖 场增强因子 |
| 文章编号： | 1005-488X(2003)04-0218-03 |
| 修稿时间： | 2003年7月22日 |
Study on the Field Electron Emission of Nanocrystalline Diamond on Si and Si Tips |
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| LIAO Ke-jun,WANG Wan-lu,L UDD.Study on the Field Electron Emission of Nanocrystalline Diamond on Si and Si Tips[J].Optoelectronic Technology,2003,23(4):218-220. |
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| Authors: | LIAO Ke-jun WANG Wan-lu L U[DD |
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| Abstract: | In this paper, the field emission properties of nanocystalline dia mond on Si and Si tips were investigated. Nanocrystalline diamond was synthesize d by hot-filament chemical vapour deposition. The reactive gases were the mixtu r es of CH 4, N 2 and H 2. The experimental results showed the field emissio n of nano crystalline diamond on Si, especially on Si tips was greatly improved as compar ed with polycrystalline diamond on Si. The threshold and current of field emission were closely relative to diamond grain size. The results obtained were discussed. |
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| Keywords: | Nanocrystalline diamond field electron emission Si tips field enhancement factor |
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