| 220 GHz折叠波导行波管慢波结构的损耗研究 |
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| 引用本文： | 潘 攀,李含雁,冯进军.220 GHz折叠波导行波管慢波结构的损耗研究[J].太赫兹科学与电子信息学报,2015,13(5):718-721. |
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| 作者姓名： | 潘 攀 李含雁 冯进军 |
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| 作者单位： | National Key Laboratory of Science and Technology on Vacuum Electronics，Beijing Vacuum Electronics Research Institute，Beijing 100015，China,National Key Laboratory of Science and Technology on Vacuum Electronics，Beijing Vacuum Electronics Research Institute，Beijing 100015，China and National Key Laboratory of Science and Technology on Vacuum Electronics，Beijing Vacuum Electronics Research Institute，Beijing 100015，China |
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| 摘 要： | 在太赫兹频段，折叠波导慢波结构的损耗很大，因此需要在设计220 GHz折叠波导行波管慢波结构时进行深入研究。首先通过软件仿真的方法预测了慢波结构的S参数，然后利用紫外光刻、电镀和微铸模成型(UV-LIGA)工艺制作了慢波结构样品并进行测量。测量结果表明，该样品在220 GHz时衰减系数约为240 dB/m，与仿真结果符合较好。显微照片显示，该样品产生了形变，造成高频段2种结果存在差异。
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| 关 键 词： | 折叠波导 损耗 衰减 太赫兹 |
| 收稿时间： | 2014/10/18 0:00:00 |
| 修稿时间： | 2014/12/11 0:00:00 |
Study on loss of the slow wave structure of a folded waveguide TWT at 220 GHz |
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| PAN Pan,LI Hanyan and FENG Jinjun.Study on loss of the slow wave structure of a folded waveguide TWT at 220 GHz[J].Journal of Terahertz Science and Electronic Information Technology,2015,13(5):718-721. |
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| Authors: | PAN Pan LI Hanyan and FENG Jinjun |
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| Abstract: | The loss of the folded waveguide slow wave structure is significant in the terahertz regime, which is necessary to be well studied as designing the slow wave structure of a folded waveguide Traveling Wave Tube(TWT) at 220 GHz. In this paper, the S parameters of the slow wave structure are predicted firstly by simulation, and then the sample of the slow wave structure is fabricated by Ultra Violet-Lithographie, Galanoformung, Abformung(UV-LIGA) process and measured. The measurement result shows that the attenuation factor of the sample is about 240 dB/m at 220 GHz, which is reasonably consistent with the simulation result. The micrographs show that there is a discrepancy between two results at higher frequencies due to the sample deformation. |
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