| 高性能高温超导红外探测器 |
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| 引用本文： | 刘心田,陆惠秀,刘兴海,陈启斌,汤定元. 高性能高温超导红外探测器[J]. 红外技术, 1997, 19(6): 5-7 |
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| 作者姓名： | 刘心田 陆惠秀 刘兴海 陈启斌 汤定元 |
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| 作者单位： | 中国科学院上海技术物理研究所 |
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| 摘 要： | 选用高温超导体ＹＢＣＯ薄膜，利用集成微加工工艺，制成高温超导红外探测器。测得器件的等效噪声功率ＮＥＰ达到１０－１２Ｗ／Ｈｚ１／２，探测率Ｄ为１０９ｃｍＨｚ１／２／Ｗ，其中最好的器件性能为Ｄ＝１．８×１０１０ｃｍＨｚ１／２／Ｗ，表明这类探测器已进入实用阶段，成为红外探测技术发展的新方向之一。
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| 关 键 词： | 红外探测器 高温超导体 超导材料 |
Fabrication of High T c Superconducting Infrared Detectors with High Performance |
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| Liu Xintian,Lu Huixiu,Liu Xinhai,Chen Qibin,Tang Dingyuan. Fabrication of High T c Superconducting Infrared Detectors with High Performance[J]. Infrared Technology, 1997, 19(6): 5-7 |
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| Authors: | Liu Xintian Lu Huixiu Liu Xinhai Chen Qibin Tang Dingyuan |
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| Abstract: | The high T c superconducting infrared detectors were fabricated by using thin film of integration technology.It was shown that the performance of the detectors were goods,NEP was 10 -12 W/Hz 1/2 and D * 10 9 cmHz 1/2 /W.In the future,high T c superconduct inginfrared detectors may offer practical applications.It is one of the developing trend of IR detection technology. |
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| Keywords: | IR detector High T c superconductor |
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