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长波红外2048元线列碲镉汞焦平面器件
引用本文:李言谨,杨建荣,何力,张勤耀,丁瑞军,方维政,陈新强,魏彦峰,巫艳,陈路,胡晓宁,王建新,倪云芝,唐红兰,王正官.长波红外2048元线列碲镉汞焦平面器件[J].红外与毫米波学报,2009,28(2):90-92.
作者姓名:李言谨  杨建荣  何力  张勤耀  丁瑞军  方维政  陈新强  魏彦峰  巫艳  陈路  胡晓宁  王建新  倪云芝  唐红兰  王正官
作者单位:中国科学院上海技术物理研究所,上海,200083
基金项目:国家自然科学基金创新研究群体基金 
摘    要:介绍了长波红外2048元线列碲镉汞焦平面器件的制备技术和达到的性能参数.探测器采用离子注入平面pn结制备光敏元,通过间接倒焊技术和读出电路互联,采用8个256元焦平面模块拼接2048元线列焦平面器件.光敏元的响应截止波长达到9.9μm,相应的RoA达到10Ωcm2,平均峰值探测率达到9.3×1010cmHz1/2 W-1,响应不均匀性为8%,有效光敏元率大干99.5%.

关 键 词:长波  长线列  红外焦平面  碲镉汞
收稿时间:2008/2/27

LONG-WAVE INFRARED 2048-ELEMENTS LINEAR HgCdTe FOCAL PLANE ARRAY
LI Yan-Jin,YANG Jian-Rong,HE Li,ZHANG Qin-Yao,DING Rui-Jun,FANG Wei-Zheng,CHEN Xin-Qiang,WEI Yan-Feng,WU Yan,CHEN Lu,HU Xiao-Ning,WANG Jian-Xin,NI Yun-Zhi,TANG Hong-Lan,WANG Zheng-Guan.LONG-WAVE INFRARED 2048-ELEMENTS LINEAR HgCdTe FOCAL PLANE ARRAY[J].Journal of Infrared and Millimeter Waves,2009,28(2):90-92.
Authors:LI Yan-Jin  YANG Jian-Rong  HE Li  ZHANG Qin-Yao  DING Rui-Jun  FANG Wei-Zheng  CHEN Xin-Qiang  WEI Yan-Feng  WU Yan  CHEN Lu  HU Xiao-Ning  WANG Jian-Xin  NI Yun-Zhi  TANG Hong-Lan  WANG Zheng-Guan
Affiliation:Shanghai Institute of Technical Physics;Chinese Academy of Sciences;Shanghai 200083;China
Abstract:The technology and performance of long-wave 2048-elements linear HgCdTe focal plane array were reported. The n-on-p photodiodes were fabricated by planar ion implantation and hybridized with readout circuit by indirect flip chip technique. The 2048-elements linear array consists of 8 segments of 256-element linear arrays that are “butted” on a single substrate in a staggered format. The cut off wavelength and R 0 A of the photodiode are 9.9μm and 10 Ωcm 2 , respectively. The average detectivity of the 2048-elements linear array is 9.3×10 10 cmHz 1/2 W -1 . The ununiformity of response is 8%. The array peak operability is larger than 99.5%.
Keywords:long wave  long linear array  infrared focal plane  HgCdTe  
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