| 微悬臂梁非致冷红外探测器的研制 |
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| 引用本文： | 刘海涛,陈永平,梁平治.微悬臂梁非致冷红外探测器的研制[J].红外与毫米波学报,2006,25(1):46-49. |
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| 作者姓名： | 刘海涛 陈永平 梁平治 |
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| 作者单位： | 1. 中国科学院上海技术物理研究所,上海,200083;中国科学院研究生院,北京,100039
2. 中国科学院上海技术物理研究所,上海,200083 |
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| 摘 要： | 介绍了一种基于标准硅工艺的微悬臂梁非致冷红外探测器的设计和制作.由于氮化硅和铝的热膨胀系数相差很大,用这两种材料的薄膜做成的双材料微悬臂梁在红外辐射下温度升高并发生弯曲,微悬臂梁和衬底形成一个可变电容,通过检测电容的变化来反映微悬臂梁的弯曲,从而可以探测红外辐射的情况.利用外部测试设备对单元探测器进行测试表明,该微悬臂梁对红外辐射有很高的响应.
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| 关 键 词： | 非致冷红外探测器 微悬臂梁 电容 微电子机械系统 |
| 文章编号： | 1001-9014（2006）01-0046-04 |
| 收稿时间： | 2005-05-23 |
| 修稿时间： | 2005-11-27 |
DESIGN AND FABRICATION OF MICRO-CANTILEVER UNCOOLED INFRARED DETECTOR |
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| LIU Hai-Tao,CHEN Yong-Ping,LIANG Ping-Zhi.DESIGN AND FABRICATION OF MICRO-CANTILEVER UNCOOLED INFRARED DETECTOR[J].Journal of Infrared and Millimeter Waves,2006,25(1):46-49. |
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| Authors: | LIU Hai-Tao CHEN Yong-Ping LIANG Ping-Zhi |
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| Affiliation: | 1. Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China; 2. Postgraduate School, Chinese Academy of Sciences, Beijing 100039, China |
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| Abstract: | A micro-cantilever uncooled infrared(IR) detector was designed and fabricated based on standard silicon process.Because silicon nitride(S_iN_x) and aluminum(Al) have different thermal expansion coefficients,bi-material micro-cantilever that is composed of the films of S_iN_x and Al will bend when it absorbs IR radiation and its temperature changes.The variable micro-capacitor between the micro-cantilever and the substrate will change as the micro-cantilever bends.Hence,the information of IR radiation can be known when the change of the variable micro-capacitor is detected.The test of a single detector by outer apparatus shows that the micro-cantilever has strong response to IR radiation. |
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| Keywords: | uncooled IR detector micro-cantilever capacitor MEMS |
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