| 微测辐射热计的红外热响应模拟 |
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| 引用本文： | 袁宁一,李格,李金华,陈效双.微测辐射热计的红外热响应模拟[J].红外与毫米波学报,2006,25(3):183-187. |
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| 作者姓名： | 袁宁一 李格 李金华 陈效双 |
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| 作者单位： | 1. 江苏工业学院,功能材料实验室,江苏,常州,213016
2. 中国科学院上海技术物理研究所,红外物理国家重点实验室,上海,200083 |
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| 基金项目： | 中国科学院资助项目;国家重点实验室基金 |
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| 摘 要： | 利用有限元法对微桥结构的测辐射热计进行了二维热模拟.定量地分析了探测单元的大小尺寸、支撑层的厚度,支撑臂的长度和宽度、引线材料的选取等对微测辐射热计探测单元在红外辐射下温度的变化和热响应的快慢情况.评估了真空封装对微测辐射热计红外响应的影响.同时作为比较对平板空腔结构的红外探测器也进行了分析.
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| 关 键 词： | 微测辐射热计 红外热响应 有限元 模拟 |
| 文章编号： | 1001-9014（2006）03-0183-05 |
| 收稿时间： | 2005-11-20 |
| 修稿时间： | 2006-02-21 |
THERMAL RESPONSE SIMULATION OF MICROBOLOMETER |
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| YUAN Ning-Yi,LI Ge,LI Jin-Hu,CHEN Xiao-Shuang.THERMAL RESPONSE SIMULATION OF MICROBOLOMETER[J].Journal of Infrared and Millimeter Waves,2006,25(3):183-187. |
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| Authors: | YUAN Ning-Yi LI Ge LI Jin-Hu CHEN Xiao-Shuang |
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| Affiliation: | 1. Functional Materials Lab. , Jiangsu Polytechnic University, Changzhou 213016, China; 2. National Laboratory for hffrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Science, Shanghai 200083, China |
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| Abstract: | Two-dimensional thermal simulations of the microbolometer with a micro-bridge structure by finite element method were done.The effects of pixel size,suspended film thickness,length and width of suspended leg,down-lead,vacuum package on the temperature changes and thermal time constants of pixels induced by infrared radiation were analyzed.To compare,the performance of microbolometer with a cavum structure was also discussed. |
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| Keywords: | microbolometer infrared thermal response finite element simulation |
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