| 基于多层薄膜的长波红外InAs/GaSb II类超晶格焦平面光响应调控研究 |
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| 引用本文： | 史睿,周建,白治中,徐志成,周易,梁钊铭,师瑛,徐庆庆,陈建新.基于多层薄膜的长波红外InAs/GaSb II类超晶格焦平面光响应调控研究[J].红外与毫米波学报,2022,41(1):248-252. |
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| 作者姓名： | 史睿 周建 白治中 徐志成 周易 梁钊铭 师瑛 徐庆庆 陈建新 |
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| 作者单位： | 中国科学院上海技术物理研究所红外成像材料与器件重点实验室,上海200083;上海科技大学信息学院,上海201210,中国科学院上海技术物理研究所红外成像材料与器件重点实验室,上海200083 |
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| 基金项目： | Supported by the National Natural Science Foundation of China （NSFC） （ 61904183， and 61974152）， the National Key Research and Development Program of China （2016YFB0402403）， the Youth Innovation Promotion Association， CAS （ 2016219）， the Innovation Engineering Frontier Program of SITP， CAS （ 233） and the Fund of Shanghai Science and Technology Foundation （16JC1400403）. |
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| 摘 要： | 本文基于长波InAs/GaSb Ⅱ类超晶格红外焦平面阵列(Focal Plane Array,FPA)设计和生长了由ZnS和Ge组成的多层薄膜结构。与没有多层薄膜的FPA相比,多层薄膜使其响应峰位置从8.7μm和10.3μm分别移动到9.8μm和11.7μm,50%响应截止波长从11.6μm移动至12.3μm,并且在波长为12μm处的响应强度增加了69%。总之,优化的多层薄膜可以调控FPA的响应波长,这为实现更高灵敏度和更高成像能力的长波红外探测提供了更好的平台。
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| 关 键 词： | II类超晶格 焦平面阵列 多层薄膜 响应调控 Type-Ⅱ superlattices FPAs multi-coatings tunable response |
| 收稿时间： | 2020/6/18 0:00:00 |
| 修稿时间： | 2022/1/11 0:00:00 |
Tuning the optical response of long-wavelength InAs/GaSb Type-II superlattices infrared focal plane arrays with multi-coatings |
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| SHI Rui,ZHOU Jian,BAI Zhi-Zhong,XU Zhi-Cheng,ZHOU Yi,LIANG Zhao-Ming,SHI Ying,XU Qing-Qing and CHEN Jian-Xin.Tuning the optical response of long-wavelength InAs/GaSb Type-II superlattices infrared focal plane arrays with multi-coatings[J].Journal of Infrared and Millimeter Waves,2022,41(1):248-252. |
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| Authors: | SHI Rui ZHOU Jian BAI Zhi-Zhong XU Zhi-Cheng ZHOU Yi LIANG Zhao-Ming SHI Ying XU Qing-Qing and CHEN Jian-Xin |
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| Affiliation: | (Key Laboratory of Infrared Imaging Materials and Devices,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China;School of Information Science and Technology,Shanghai Tech University,Shanghai 201210,China) |
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| Abstract: | In this paper,the multi-coatings composed of layers of zinc sulfide and germanium were designed and fabricated on a long-wavelength InAs/GaSb Type-Ⅱ superlattices infrared focal plane arrays(FPAs).Compared with the FPAs without multi-coatings,the multi-coatings make the response peaks of the FPAs shift from the wavelength of 8.7μm and 10.3μm to that of 9.8μm and 11.7μm.The 50%response cut-off wavelength of the FPAs shifts from 11.6μm to 12.3μm,and the response intensity of the FPAs is increased by 69%at the wavelength of 12μm.In summary,the multi-coatings make the response wavelength of the FPAs tunable,which provides a powerful platform for more sensitive long-wave detection and improving imaging capabilities. |
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| Keywords: | Type-II superlattices FPAs multi-coatings tunable response |
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