| CMOS兼容的中红外多通道光子晶体传感器 |
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| 引用本文： | 周易,王磊,李军,杨雪雷,甘峰源,赵瑛璇,仇超,李伟.CMOS兼容的中红外多通道光子晶体传感器[J].红外与毫米波学报,2020,39(3):279-283. |
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| 作者姓名： | 周易 王磊 李军 杨雪雷 甘峰源 赵瑛璇 仇超 李伟 |
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| 作者单位： | 中国科学院上海微系统与信息技术研究所,硅基材料与集成器件实验室,上海 200050;中国科学院上海微系统与信息技术研究所,硅基材料与集成器件实验室,上海 200050;中国科学院上海微系统与信息技术研究所,硅基材料与集成器件实验室,上海 200050;中国科学院上海微系统与信息技术研究所,硅基材料与集成器件实验室,上海 200050;中国科学院上海微系统与信息技术研究所,硅基材料与集成器件实验室,上海 200050;中国科学院上海微系统与信息技术研究所,硅基材料与集成器件实验室,上海 200050;中国科学院上海微系统与信息技术研究所,硅基材料与集成器件实验室,上海 200050;中国科学院上海微系统与信息技术研究所,硅基材料与集成器件实验室,上海 200050 |
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| 基金项目： | 上海市青年科技英才扬帆计划 |
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| 摘 要： | 我们提出了一种基于光子晶体的二维多通道光学化学传感器。该器件由中心波长为3.3 μm的四个腔组成，各通道工作波长间隔为10 nm。该传感器采用800 nm厚的绝缘体上硅材料，可利用标准CMOS技术加工。我们通过三维时差有限差分法对微腔结构的光学特性进行模拟。每个通道的传输效率为39％，通道之间的传输效率不一致性小于0.25dB。该传感器的功能为检测四氯化碳和苯溶液浓度，其灵敏度为209.2 nm/RIU。
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| 关 键 词： | 光子晶体 传感器 多通道 中红外 |
| 收稿时间： | 2019/11/12 0:00:00 |
| 修稿时间： | 2020/3/28 0:00:00 |
CMOS compatible multichannel mid-infrared photonic crystal sensor |
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| ZHOU Yi,WANG Lei,LI Jun,YANG Xue-Lei,GAN Feng-Yuan,ZHAO Ying-Xuan,QIU Chao and LI Wei.CMOS compatible multichannel mid-infrared photonic crystal sensor[J].Journal of Infrared and Millimeter Waves,2020,39(3):279-283. |
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| Authors: | ZHOU Yi WANG Lei LI Jun YANG Xue-Lei GAN Feng-Yuan ZHAO Ying-Xuan QIU Chao and LI Wei |
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| Affiliation: | Laboratory of Silicon based Materials and Integrated Devices, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China,Laboratory of Silicon based Materials and Integrated Devices, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China,Laboratory of Silicon based Materials and Integrated Devices, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China,Laboratory of Silicon based Materials and Integrated Devices, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China,Laboratory of Silicon based Materials and Integrated Devices, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China,Laboratory of Silicon based Materials and Integrated Devices, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China,Laboratory of Silicon based Materials and Integrated Devices, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China,Laboratory of Silicon based Materials and Integrated Devices, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China |
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| Abstract: | |
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| Keywords: | photonic crystal sensor multichannel mid-infrared |
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