| 基于二维模型的静电梳状结构平稳性分析 |
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| 引用本文： | 黄霞,戴玉堂.基于二维模型的静电梳状结构平稳性分析[J].微电子学与计算机,2006,23(4):197-200. |
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| 作者姓名： | 黄霞 戴玉堂 |
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| 作者单位： | 武汉理工大学光纤传感技术与信息处理教育部重点实验室,湖北,武汉,430070 |
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| 摘 要： | 微静电驱动器作为MEMS中一个重要的功能实现器，是当前MEMS中研究的热点。文章基于二维模型结合垂直平移刚度及转动刚度两方面综合考虑，对静电微驱动结构单元的面不平稳性及最大静态位移进行了研究分析。其最大静态位移与叉指间距，初始重叠长度以及弹性系数比有关，分析了理论结果并通过FEM进行验证。
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| 关 键 词： | 梳齿驱动结构 平稳性分析 大位移 |
| 文章编号： | 1000-7180（2006）04-197-04 |
| 收稿时间： | 2005-07-06 |
| 修稿时间： | 2005-07-06 |
Stability Analysis of Electrostatic Comb Drive Actuators Based on a Two-dimensional Model |
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| HUANG Xia,DAI Yu-tang.Stability Analysis of Electrostatic Comb Drive Actuators Based on a Two-dimensional Model[J].Microelectronics & Computer,2006,23(4):197-200. |
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| Authors: | HUANG Xia DAI Yu-tang |
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| Affiliation: | Key Laboratory of Fiber Optic Sensing Technology and Information Processing, Wuhan University of Technology, Ministry of Education, Wuhan 430070 China |
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| Abstract: | Comb drive actuators are widely used microactuators in MEMS devices. Developing a comb drive actuator with large static displacement is a major research interest. This paper presents a stability analysis of the comb drive actuators based on a two-dimensional model. And analytic solutions of the stable travel range are developed. The side instability and the stable travel range of the comb drive actuator depend on the finger gap spacing, the initial finger overlap, and the spring stiffness ratio of the compliant suspension. The theoretical results are in good agreement with the FEM results. |
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| Keywords: | MEMS |
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