| 薄膜体声波谐振器电极效应研究 |
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| 引用本文： | 张涛,解忧,刘婷,周胜男.薄膜体声波谐振器电极效应研究[J].微电子学与计算机,2012,29(10):206-208. |
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| 作者姓名： | 张涛 解忧 刘婷 周胜男 |
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| 作者单位： | 西安科技大学理学院,陕西西安,710054 |
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| 基金项目： | 教育部博士点基金，中国博士后基金面上资助，陕西省自然科学基金青年人才项目，陕西省教育厅产业化专项基金，西安市科技局工业攻关计划项目(CXYll25 |
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| 摘 要： | 运用传输线路法推导了薄膜体声波谐振器(Thin Film Bulk Acoustic Resonator,FBAR)的输入阻抗公式.利用输入阻抗公式,研究了不同材料FBAR构成中电极材料和厚度对FBAR有效机电耦合系数的影响,FBAR最大有效机电耦合系数优化理论.由结论可知,FBAR的有效机电耦合系数随电极的厚度和密度变化明显,在低密度电极材料时,电极厚度增大明显降低了FBAR的有效机电耦合系数;同时,在电极厚度较厚时,电极密度越大越有利于获取高的有效机电耦合系数.所得结论,可应用于FBAR设计与优化中.
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| 关 键 词： | 薄膜体声波谐振器 电极效应 有效机电耦合系数 |
Research on Electrode Effects of Thin Film Bulk Acoustic Resonator |
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| ZHANG Tao,XIE You,LIU Ting,ZHOU Sheng-nan.Research on Electrode Effects of Thin Film Bulk Acoustic Resonator[J].Microelectronics & Computer,2012,29(10):206-208. |
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| Authors: | ZHANG Tao XIE You LIU Ting ZHOU Sheng-nan |
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| Affiliation: | (College of Science,Xi an University of Science and Technology,Xi an 710054,China) |
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| Abstract: | The transmission line method is used to deduce the input impedance equation of thin film bulk acoustic resonator(FBAR) in this paper.The different combinations of FBAR are studied on by the equation,and the material and the thickness of electrode effects on FBAR are obtained,which includes the maximum effective electromechanical coupling factor theory.The results show that the effective electromechanical coupling factor verifies with the electrode and the density of the electrodes,and the electromechanical coupling factor descends with the thickness of electrodes,which is obvious if the density of electrode is small.On the other hand,the effective electromechanical coupling factor ascends with the density of electrodes,which is obvious if the thickness is large.These results can be applied in the design and the optimization of FBARs. |
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| Keywords: | thin fihn bulk acoustic resonator~electrode effect~ effective electromechanical coupling factor |
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