| 基于光声光谱法气体探测传声器的研究进展 |
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| 引用本文： | 刘小玲,罗荣辉,张操,郭小伟.基于光声光谱法气体探测传声器的研究进展[J].电子与封装,2011,11(2):34-38. |
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| 作者姓名： | 刘小玲 罗荣辉 张操 郭小伟 |
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| 作者单位： | 郑州大学物理工程学院; |
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| 摘 要： | 光声光谱法气体探测技术具有灵敏度高、选择性高、不消耗被测量气体等优点,在现代工农业、环境监测,生物技术等领域发挥着重要的作用.随着这些领域的发展,人们对气体探测器的综合性能要求越来越高,因而光声气体探测器得到了良好的发展和应用.基于光声光谱法探测气体是利用气体光声效应原理,其中传声器是气体探测系统的一个重要声电转换器件...
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| 关 键 词： | 光声光谱 气体探测 硅微电容传声器 驻极体 |
The Research Progress of Microphone based Photoacoustic Spectroscopy Gas Detection |
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| LIU Xiao-ling,LUO Rong-hui,ZHANG Cao,GUO Xiao-wei.The Research Progress of Microphone based Photoacoustic Spectroscopy Gas Detection[J].Electronics & Packaging,2011,11(2):34-38. |
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| Authors: | LIU Xiao-ling LUO Rong-hui ZHANG Cao GUO Xiao-wei |
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| Affiliation: | LIU Xiao-ling,LUO Rong-hui,ZHANG Cao,GUO Xiao-wei(School of Physics and Engineering,Zhengzhou University,Zhengzhou 450001,China) |
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| Abstract: | Photoacoustic spectroscopy(PAS)has a lot of advantages,for example,high sensitivity,high selectivity,without the shortcoming of gas consumotion,and so on,thus it has important effections in modern industry and agriculture,environmental monitoring,biotechnology and other fields.The people has been actively improving comprehensive performance of gas detectors with these developments in the fields.Thus,photoacoustic gas detectors get goog progress and application.Based on PAS gas detection is to use the princi... |
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| Keywords: | photoacoustic spectroscopy gas detecting Si-based capacitive microphone ECM |
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