| 用扫描电镜研究CNx/TiN涂层的摩擦磨损 |
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| 引用本文： | 刘传胜,付强,叶明生,蒋昌忠,范湘军.用扫描电镜研究CNx/TiN涂层的摩擦磨损[J].电子显微学报,2003,22(4):323-326. |
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| 作者姓名： | 刘传胜 付强 叶明生 蒋昌忠 范湘军 |
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| 作者单位： | 武汉大学物理科学与技术学院,湖北,武汉,430072 |
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| 基金项目： | 国家自然科学基金，50175082， |
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| 摘 要： | 利用一台直流磁控溅射和多弧沉积设备在高速钢(HSS)衬底上沉积CNx／TiN多层复合膜，涂层的硬度超过50GPa。销-盘式摩擦试验研究了涂层的滑动摩擦性能，利用扫描电镜观察并分析了薄膜的磨损模式。结果显示涂层结构致密，附着牢固。涂层的主要磨损形式为粘着磨损、疲劳磨损和磨粒磨损。
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| 关 键 词： | 扫描电镜 直流磁控溅射 多弧沉积设备 多层复合膜 涂层硬度 磨损模式 疲劳磨损 磨粒磨损 |
| 文章编号： | 1000-6281(2003)04-0323-04 |
SEM observation of the CNx/TiN composite multilayer friction and wear |
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| LIU Chuan sheng,FU Qiang,YE Ming sheng,JIANG Chang zhong,FAN Xiang jun.SEM observation of the CNx/TiN composite multilayer friction and wear[J].Journal of Chinese Electron Microscopy Society,2003,22(4):323-326. |
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| Authors: | LIU Chuan sheng FU Qiang YE Ming sheng JIANG Chang zhong FAN Xiang jun |
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| Abstract: | A dc magnetron sputtering and multi arc deposition system was used to grow CN X/TiN alternating composite coatings on HSS substrate. The hardness of these coatings exceeds 50GPa. The sliding friction properties were studied by ball on disk test under different load and speed. The mode of the wear of coatings was observed by scanning electron microscope (SEM) and analyzed. The composite multilayer is dense and well abrasive. The main mode of the wear of the coatings is adhesive wear, fatigue wear and grind wear. |
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| Keywords: | composite multiplayer wear SEM |
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