| 基于聚焦离子束技术制备金刚石/M（M＝Cu，Al，AlN）双相复合材料HRTEM样品 |
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| 引用本文： | 乔祎,李建伟,刘刚,张洋,陈良贤,史为,严琴舫,张海龙.基于聚焦离子束技术制备金刚石/M（M＝Cu，Al，AlN）双相复合材料HRTEM样品[J].电子显微学报,2016(1):53-57. |
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| 作者姓名： | 乔祎 李建伟 刘刚 张洋 陈良贤 史为 严琴舫 张海龙 |
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| 作者单位： | 1. 北京科技大学1. 新金属材料国家重点实验室;2. 材料科学与工程学院,北京,100083;3. 蔡司光学仪器,北京,100083 |
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| 基金项目： | 国家自然科学基金资助项目(51401021) |
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| 摘 要： | 分别以金刚石/Cu，金刚石/Al，金刚石/AlN等双相复合材料为研究对象，应用聚焦离子束( FIB)场发射扫描双束电镜，成功制备了含双相及界面结构的高分辨透射电镜( HRTEM)样品，并减小了Ga离子的非晶损伤层。HRTEM成功观测到金刚石与不同材料复合时的晶体共格/半共格/非共格关系，为进一步研究金刚石双相复合材料的界面成分和晶体结构奠定了基础。
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| 关 键 词： | FIB 金刚石/Al 金刚石/Cu 金刚石/AlN HRTEM |
Applications of FIB technique in the preparation of HRTEM samples for diamond/M(M=Cu,Al, AlN) composite materials |
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| Abstract: | Dual-phase composite materials such as diamond / Cu, diamond / Al and diamond /AlN were investigated in this paper. High resolution transmission electron microscopy ( HRTEM ) samples containing the two phases and the interface were prepared by focused ion beam ( FIB) technique. During the preparation, the Ga ion-induced amorphous damaged layer was successfully reduced. The crystallographic orientation relationship of coherent, semi coherent or incoherent between diamond and other material was characterized clearly through HRTEM. The results are useful for further study of chemical composition and crystal structure of the diamond-containing dual-phase interface. |
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| Keywords: | FIB diamond/Al diamond/Cu diamond/AlN HRTEM |
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