| BG-102型分步投影光刻机减振台研制 |
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| 引用本文： | 雷鸣.BG-102型分步投影光刻机减振台研制[J].电子工业专用设备,2001,30(3):20-25. |
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| 作者姓名： | 雷鸣 |
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| 作者单位： | 信息产业部电子第四十五研究所 |
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| 摘 要： | 概述了BG - 1 0 2型分步投影光刻机减振台的空气弹簧和高度阀的结构和工作原理 ,同时介绍了有关技术参数设计。重点讨论了减振台的结构设计和自动水平校正的机理。
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| 关 键 词： | 减振台 空气弹簧 高度阀 压力 流量 隔振 减振 |
| 文章编号： | 1004-4507(2001)03-0020-06 |
| 修稿时间： | 2001年6月20日 |
The Design of Vibration Reduction Table for Model BG - 102 Stepper |
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| LEI,Ming.The Design of Vibration Reduction Table for Model BG - 102 Stepper[J].Equipment for Electronic Products Marufacturing,2001,30(3):20-25. |
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| Authors: | LEI Ming |
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| Abstract: | The construction and working principle of air spring and height valve for vibration reduction table of the model BG-102 stepper is summarized in this paper, And also introducing the correlative design of technical parameter. The paper mainly discuss the structural design of vibration reduction table and its self-adjusting mechanism toward horizontal. |
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| Keywords: | Vibration Reduction Table Air Spring Height Valve Pressure Flux Vibration Isolation Vibration Reduction |
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