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适用于200mm太阳能电池片的闭管扩散/氧化系统设计
引用本文:钟华,盛金龙.适用于200mm太阳能电池片的闭管扩散/氧化系统设计[J].电子工业专用设备,2007,36(5):51-54.
作者姓名:钟华  盛金龙
作者单位:北京七星华创电子股份有限公司,北京,100016
基金项目:Acknowledgment: When the dissertation is coming to the end, I have not sufficient words to express my gratitude to our senior mechanical engineer Shen Qiang for his constant emotional support and for his sound all-around advice. 0ver the course of my dissertation, he has provided me with useful information of both e-beam lithography and turbo pump. I thank Shen Qiang for being here for me every step of the way.
摘    要:介绍了适用于太阳能电池生产线闭管磷扩散设备,着重阐述了该设备的结构组成、工艺原理及控制。

关 键 词:闭管扩散  太阳能  设备
文章编号:1004-4507(2007)05-0050-04
修稿时间:2007-04-16

Diffusion/Oxidation System Design For 200 mm Solar Square Wafer
ZHONG Hua,SHENG Jin-long.Diffusion/Oxidation System Design For 200 mm Solar Square Wafer[J].Equipment for Electronic Products Marufacturing,2007,36(5):51-54.
Authors:ZHONG Hua  SHENG Jin-long
Institution:Beijing Sevenstar Huachuang Electronic Co. ltd. Beijing, China 100016
Abstract:A kind of diffusion equipment for solar battery product line is introduced. The main configuration,process and control are described.
Keywords:Closed Tube Diffusion  Solar battery  Equipment
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