| 适用于200 mm太阳能电池片的闭管扩散/氧化系统设计 |
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| 作者姓名： | 钟华 盛金龙 |
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| 作者单位： | 北京七星华创电子股份有限公司,北京,100016;北京七星华创电子股份有限公司,北京,100016 |
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| 基金项目： | Acknowledgment： When the dissertation is coming to the end, I have not sufficient words to express my gratitude to our senior mechanical engineer Shen Qiang for his constant emotional support and for his sound all-around advice. 0ver the course of my dissertation, he has provided me with useful information of both e-beam lithography and turbo pump. I thank Shen Qiang for being here for me every step of the way. |
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| 摘 要： | 介绍了适用于太阳能电池生产线闭管磷扩散设备,着重阐述了该设备的结构组成、工艺原理及控制。
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| 关 键 词： | 闭管扩散 太阳能 设备 |
| 文章编号： | 1004-4507（2007）05-0050-04 |
| 修稿时间： | 2007-04-16 |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
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