| 适用于200mm太阳能电池片的闭管扩散/氧化系统设计 |
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| 引用本文： | 钟华,盛金龙.适用于200mm太阳能电池片的闭管扩散/氧化系统设计[J].电子工业专用设备,2007,36(5):51-54. |
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| 作者姓名： | 钟华 盛金龙 |
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| 作者单位： | 北京七星华创电子股份有限公司,北京,100016 |
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| 基金项目： | Acknowledgment： When the dissertation is coming to the end, I have not sufficient words to express my gratitude to our senior mechanical engineer Shen Qiang for his constant emotional support and for his sound all-around advice. 0ver the course of my dissertation, he has provided me with useful information of both e-beam lithography and turbo pump. I thank Shen Qiang for being here for me every step of the way. |
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| 摘 要： | 介绍了适用于太阳能电池生产线闭管磷扩散设备,着重阐述了该设备的结构组成、工艺原理及控制。
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| 关 键 词： | 闭管扩散 太阳能 设备 |
| 文章编号： | 1004-4507（2007）05-0050-04 |
| 修稿时间： | 2007-04-16 |
Diffusion/Oxidation System Design For 200 mm Solar Square Wafer |
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| ZHONG Hua,SHENG Jin-long.Diffusion/Oxidation System Design For 200 mm Solar Square Wafer[J].Equipment for Electronic Products Marufacturing,2007,36(5):51-54. |
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| Authors: | ZHONG Hua SHENG Jin-long |
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| Affiliation: | Beijing Sevenstar Huachuang Electronic Co. ltd. Beijing, China 100016 |
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| Abstract: | A kind of diffusion equipment for solar battery product line is introduced. The main configuration,process and control are described. |
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| Keywords: | Closed Tube Diffusion Solar battery Equipment |
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