| 激光三角法测量技术在光刻机中的应用 |
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| 引用本文： | 袁秀丽.激光三角法测量技术在光刻机中的应用[J].电子工业专用设备,2010,39(5):34-37. |
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| 作者姓名： | 袁秀丽 |
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| 作者单位： | 中国电子科技集团公司第十三研究所,石家庄,050051 |
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| 摘 要： | 介绍了激光三角法测量原理和分类,对不同类型进行了分析比较。介绍了CCD的激光三角法高度测量系统在光刻机中的应用及在高度测量时实时和映射两种工作模式。在应用中可以针对不同的测量对象表面的光学特征,使用对应的表格,提高其测量的适应性和测量效率。
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| 关 键 词： | 光刻 CCD图像传感器 激光三角法 |
RApplication of Laser Triangulation on the Lithography |
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| YUAN Xiuli.RApplication of Laser Triangulation on the Lithography[J].Equipment for Electronic Products Marufacturing,2010,39(5):34-37. |
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| Authors: | YUAN Xiuli |
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| Affiliation: | YUAN Xiuli(The 13th Research Institute of CETC,Shijiazhuang 050051,China) |
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| Abstract: | This paper introduces the principle and types of laser measurement techniques based on triangulation.Some difference is analyzed and compared.It introduces a height measurement system with linear arryCCD and its application in lithography.Height measurement mapping mode and realtime mode are explained.According to the optical surface of the objective in application,use different table to improve the efficiency and flexibility of the measurement. |
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| Keywords: | Lithography CCD image sensor triangulation |
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