| 柔性结构技术在精密工件台中的应用 |
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| 引用本文： | 齐芊枫,郑椰琴,吴立伟,方洁,董俊清.柔性结构技术在精密工件台中的应用[J].电子工业专用设备,2011,40(9):1-6,53. |
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| 作者姓名： | 齐芊枫 郑椰琴 吴立伟 方洁 董俊清 |
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| 作者单位： | 上海微高精密机械工程有限公司,上海,201203 |
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| 摘 要： | 通常,在半导体设备刚性结构设计中要求零部件有很高的加工制造精度和装配精度,同时易传递振动、热等,并容易引入附加的力和转矩。为降低质量和成本,并提高工作性能,目前在工件台的设计中广泛采用柔性结构设计技术。列举了常见柔性件结构形式,并分析了不同结构形式柔性件的旋转刚度和精度等特性。同时,根据工件台的实际工作状态和性能需求,...
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| 关 键 词： | 柔性结构 柔性铰链 旋转刚度 工件台 |
Application of Flexible Structure Technology in Design of Wafer Stage |
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| QI Qianfeng,ZHENG Yeqin,WU Liwei,FANG Jie,DONG Junqing.Application of Flexible Structure Technology in Design of Wafer Stage[J].Equipment for Electronic Products Marufacturing,2011,40(9):1-6,53. |
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| Authors: | QI Qianfeng ZHENG Yeqin WU Liwei FANG Jie DONG Junqing |
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| Affiliation: | QI Qianfeng,ZHENG Yeqin,WU Liwei,FANG Jie,DONG Junqing (Shanghai nanpre mechanics Co.,Ltd,Shanghai 201203) |
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| Abstract: | Relative to rigid structure technology,flexible structure technology has more advantage,such as low force and moment transmissibility,low manufacturing cost,low assembly difficulty,etc.Flexible structure also can simplify a machine configuration and error compensation will be applied while the disturbance can be identified easily.The most important application of flexible structure technology is applying flexible hinge in proper shape and rotation stiffness to design machine.This paper introduces flexible s... |
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| Keywords: | Flexible structure Flexible hinge Rotation stiffness Wafer stage |
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