| 软着陆洁净闭管扩散炉研制 |
| |
| 引用本文： | 刘良玉,彭志坚.软着陆洁净闭管扩散炉研制[J].电子工业专用设备,2010,39(2):39-42. |
| |
| 作者姓名： | 刘良玉 彭志坚 |
| |
| 作者单位： | 中国电子科技集团公司第四十八研究所,湖南长沙,410111 |
| |
| 摘 要： | 介绍了一种用于晶体硅光伏电池片工艺的软着陆洁净闭管扩散炉,着重介绍了设备结构组成及性能,并给出了工艺结果说明设备性能达到国内领先水平。
|
| 关 键 词： | 软着陆 闭管扩散 扩散炉 |
Diffusion Furnace of Soft-landing Closure Tube |
| |
| LIU Liangyu,PENG Zhijian.Diffusion Furnace of Soft-landing Closure Tube[J].Equipment for Electronic Products Marufacturing,2010,39(2):39-42. |
| |
| Authors: | LIU Liangyu PENG Zhijian |
| |
| Affiliation: | The 48th Research Institute;CETC;Changsha 410111;China |
| |
| Abstract: | The diffusion furnace of soft-landing closure tube has been introduced in this paper, which is used for fabricating the silicon solar cell. The mainly configuration and function has been described. The results of process indicates that the performance of equipment reaches the international most advanced level. |
| |
| Keywords: | Soft-landing Closure tube diffusion Diffusion furnace |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
