| 基于MEMS工艺微悬臂梁阵列光学读出红外成像研究现状 |
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| 引用本文： | 史海涛,欧毅,陈大鹏,张青川,伍小平,焦斌斌,李超波,罗小光,由春娟. 基于MEMS工艺微悬臂梁阵列光学读出红外成像研究现状[J]. 电子工业专用设备, 2007, 36(1): 6-9 |
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| 作者姓名： | 史海涛 欧毅 陈大鹏 张青川 伍小平 焦斌斌 李超波 罗小光 由春娟 |
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| 作者单位： | 中科院微电子研究所硅器件与集成技术研究室,北京,100029;中国科学技术大学,中科院材料力学行为和设计重点实验室,合肥,230027 |
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| 基金项目： | 国家高技术研究发展计划(863计划) |
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| 摘 要： | 非制冷红外成像技术由于其成本低可考性好而倍受关注。一种基于MEMS双材料梁阵列的新概念光学读出红外成像系统也于今年来被提出来。介绍了这种系统成像原理,影响参数及其研究现状,最后展望了其发展前景。
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| 关 键 词： | 非制冷红外成像 MEMS 双材料微悬臂梁阵列 光学读出 |
| 文章编号： | 1004-4507(2007)01-0006-04 |
| 修稿时间： | 2006-12-05 |
Review on Micro-cantilever Array Based MEMS Technics Optical-eadout IR Imaging |
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| SHI Hai-tao,OU Yi,CHEN DA-peng,ZHANG Qing-chuan,WU Xiao-ping,JIAO Bin-bin,LI Chao-bo,LUO Xiao-Guang,YOU Chun-juan. Review on Micro-cantilever Array Based MEMS Technics Optical-eadout IR Imaging[J]. Equipment for Electronic Products Marufacturing, 2007, 36(1): 6-9 |
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| Authors: | SHI Hai-tao OU Yi CHEN DA-peng ZHANG Qing-chuan WU Xiao-ping JIAO Bin-bin LI Chao-bo LUO Xiao-Guang YOU Chun-juan |
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| Affiliation: | 1. Institute of Microeleclronics, Chinese Academy of Science, Beijing, 100029, China; 2. CAS Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei 230027, China |
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| Abstract: | Uncool IR imaging technology, because of its low cost and high credibility, has attracted more and more attention. Recently a sort of IR imaging system consisting of micro-cantilever array and optical-readout device is presented. This paper discusses its imaging principle, influence factor. Finally, it indicates the way this kind of devices will follow. |
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| Keywords: | MEMS |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
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