| 电热激励微悬臂梁谐振器输出电压影响因素研究 |
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| 引用本文： | 韩建强,朱长纯,刘君华,魏培永.电热激励微悬臂梁谐振器输出电压影响因素研究[J].固体电子学研究与进展,2003,23(4):504-507,519. |
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| 作者姓名： | 韩建强 朱长纯 刘君华 魏培永 |
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| 作者单位： | 西安交通大学电信学院,西安,710049 |
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| 基金项目： | 国家自然科学基金 (60 0 3 60 16,50 0 770 16)，教育部开放基金 (CETD0 0 -10 )资助 |
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| 摘 要： | 制作了电热激励硅 /二氧化硅双层微悬臂梁谐振器。对影响谐振器输出电压的因素研究结果表明 :减小梁宽度、硅层厚度、环境气压和温度 ,可增大微悬臂梁谐振器输出电压 ;输出电压随激励功率增加而增大 ;谐振器输出电压与谐振器根部压敏电桥电源电压成正比。最后论述了提高谐振器输出电压的可行途径
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| 关 键 词： | 电热激励 微悬臂梁 谐振器 |
| 文章编号： | 1000-3819(2003)04-504-04 |
The Study on the Factors Influencing the Output Voltage of Electrothermally Excited Microcantilever Resonators |
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| HAN Jianqiang ZHU Changchun L IU Junhua WEI Peiyong.The Study on the Factors Influencing the Output Voltage of Electrothermally Excited Microcantilever Resonators[J].Research & Progress of Solid State Electronics,2003,23(4):504-507,519. |
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| Authors: | HAN Jianqiang ZHU Changchun L IU Junhua WEI Peiyong |
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| Abstract: | Si/SiO 2 double-l a yer micromechanical cantilever resonato rs with electric-thermal excitation are fabricated by microelectronic and microm echincal technologies. The study on the factors influencing the output voltage o f the resonators shows that: (i)the outp ut voltage increases with decreasing the broad of beam, the thickness of the sil icon layer, ambient pressure and temper ature; (ii)the output voltage increases with excitation power; (iii)the output v oltage increases directly proportional t o DC voltage applied on the Wheatstone br i dge at the clamped end of beam. At last, the feasible method of increasing the v oltage of resonators is discussed. |
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| Keywords: | electrothermal excitati on micromechanical cantilever resonato r |
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