蓝光半导体碳化硅──材料、器件和工艺

碳化硅（ＳｉＣ）是目前主要的蓝光半导体材料之一，国际上已初步实现了ＳｉＣ蓝光发光二极管的产业化。目前商品器件工作电压３．０Ｖ，工作电流２０ｍＡ时，发射波长４７０ｎｍ，功率１８μＷ，工作电流５０ｍＡ时，辐射功率可达３６μＷ。最近的实验研究发现，采用ＳｉＣ和氮化镓的合金制成的ＬＥＤ可大幅度提高发光效率，其发射功率的实验室水平已达８５０ｍＷ。文中从ＳｉＣ材料特性、ＳｉＣ发光器件及ＳｉＣ材料、器件工艺等几方面入手，综述了ＳｉＣ作为蓝光半导体材料及其器件和工艺的研究进展。

Blue Light Emitting Semiconductor SiC: Material,Device and Technology

Silicon carbide is one of main blue-light emitting semiconductor materials,and the SiC blue LED has been developed and commercialized. The radiant wavelength of the SiC product peaks at 470 nm, while the radiant flux is 18μW under the condition of V=3. 0 V, I=20 mA, and 36μW under the condition of V=3. 0 V, I=50 mA. Recent investigations show that the blue LED made up of (SiC)1-x.(GaN)x alloy has high luminous efficiency,and the radiant fulx is 850 mW.In this paper, the research progress of the SiC material,device and technology, especially for the blue LED application are reviewed.