| 甲烷浓度对金刚石膜表面形貌及其热导率的影响 |
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| 引用本文： | 代明江 刘正义 等. 甲烷浓度对金刚石膜表面形貌及其热导率的影响[J]. 广东有色金属学报, 2002, 12(1): 17-20 |
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| 作者姓名： | 代明江 刘正义 等 |
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| 作者单位： | [1]广州有色金属研究院材料表面工程技术研究开发中心，广东广州510651 [2]华南理工大学，广东广州510650 |
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| 基金项目： | 广州市基础性研究项目 (98- J- 0 14 - 0 1) |
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| 摘 要： | 以甲烷为碳源气体，用直流等离子射流法制备了金刚石膜，研究了不同甲烷浓度对金刚石膜的表面形貌和热导率的影响。结果表明，在甲烷浓度φ（CH4）为1．5％时，可以获得较高热导率的金刚石膜。
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| 关 键 词： | 甲烷 金刚石膜 表面形貌 热导率 浓度 |
Effect of methane concentration on morphologies and thermal conductivity of diamond films |
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| DAI Ming jiang ,SONG Jin bing ,ZHOU Ke song ,DAI Da huang ,LIU Zheng yi ,QU Quan yan. Effect of methane concentration on morphologies and thermal conductivity of diamond films[J]. Journal of Guangdong Non-Ferrous Metals, 2002, 12(1): 17-20 |
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| Authors: | DAI Ming jiang SONG Jin bing ZHOU Ke song DAI Da huang LIU Zheng yi QU Quan yan |
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| Affiliation: | DAI Ming jiang 1,SONG Jin bing 1,ZHOU Ke song 1,DAI Da huang 1,LIU Zheng yi 2,QU Quan yan 2 |
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| Abstract: | Thick diamond films were deposited by DC plasma jet using methane as carbon source. Effect of methane concentration on morphologies and thermal conductivity of the deposited thick diamond films were studied. The results shows that thick diamond films deposited with 1^5% (volume fraction in hydrgen) methane have higher thermal conductivity. |
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| Keywords: | methane diamond films morphology thermal conductivity |
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