| 真空阴极电弧沉积TiB2薄膜的组织结构及其摩擦学性能的研究 |
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| 引用本文： | 朱霞高,王成彪.真空阴极电弧沉积TiB2薄膜的组织结构及其摩擦学性能的研究[J].广东有色金属学报,2002,12(2):112-115. |
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| 作者姓名： | 朱霞高 王成彪 |
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| 作者单位： | [1]广州有色金属研究院材料表面工程技术研究开发中心，广东广州510651 [2]中国地质大学，北京100083 |
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| 摘 要： | 用TiB2作阴极靶，采用优化的真空阴极电弧沉积工艺制备的TiB2薄膜是由TiB2，Ti2B5,TiB和Ti组成的多相结构。薄膜的摩擦磨损试验表明：TiB2薄膜的摩擦系数为0.139，膜层寿命超过60min，是TiN和（Ti,Al)N膜层的2倍。
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| 关 键 词： | 真空 阴极电弧沉积 TiB2薄膜 组织结构 摩擦学性能 |
Structure and tribological properties of TiB_2 films prepared by the vacuum cathodic arc deposition |
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| ZHU Xia-gao,WANG Cheng-biao.Structure and tribological properties of TiB_2 films prepared by the vacuum cathodic arc deposition[J].Journal of Guangdong Non-Ferrous Metals,2002,12(2):112-115. |
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| Authors: | ZHU Xia-gao WANG Cheng-biao |
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| Abstract: | Using TiB2 as the cathodic target, the TiB2 films prepared by the vacuum cathodic arc deposition technology are a multiphasic structure formed by TiB2, Ti2B5, TiB and Ti phases. The friction-wear tests have showed that the friction coefficient of TiB2 films is 0. 139 and their wear lifetime exceeds 60 minutes and is twice as long as TiN and (Ti,Al)N films'. |
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| Keywords: | cathodic-arc deposition TiB2 films friction-wear tests |
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