| RF-PCVD法碳化钨纳米粉的制备 |
| |
| 引用本文： | 闫波,孙彦平,王俊文,陈新谋.RF-PCVD法碳化钨纳米粉的制备[J].中国钨业,2006,21(4):38-40. |
| |
| 作者姓名： | 闫波 孙彦平 王俊文 陈新谋 |
| |
| 作者单位： | 1. 太原理工大学,洁净化工研究所,山西,太原,030024
2. 石家庄新谋新技术开发有限公司,河北,石家庄,050091 |
| |
| 基金项目： | 山西省科技攻关项目;山西省青年科研项目 |
| |
| 摘 要： | 以WCl6+H2+C2H2为反应体系,采用高频等离子化学气相沉积法(RF-PCVD)制备了纳米级碳化钨(WC)粉体,用HRTEM(高分辨率透射显微镜)、XRD(X光衍射)表征了WC粉体的形貌和物相组成,粉体为以WC为主体、W2C和WC1-X的多相共存的混合体,微粒呈近球形与少量棱柱形混合体,粒径范围为50￣100nm,平均粒径为70nm。
|
| 关 键 词： | 高频等离子体 化学气相沉积 纳米粉体 碳化钨 |
| 文章编号： | 1009-0622(2006)04-0038-03 |
| 收稿时间： | 05 16 2006 12:00AM |
| 修稿时间： | 2006年5月16日 |
Preparation Method of Nano-Sized Multi-Phase WC Powders by RF-Plasma CVD |
| |
| YAN Bo,SUN Yan-ping,WANG Jun-wen,CHEN Xin-mou.Preparation Method of Nano-Sized Multi-Phase WC Powders by RF-Plasma CVD[J].China Tungsten Industry,2006,21(4):38-40. |
| |
| Authors: | YAN Bo SUN Yan-ping WANG Jun-wen CHEN Xin-mou |
| |
| Affiliation: | 1.Chemical Engineering Department, Taiyuan University of Technology, Taiyuan 030024, Shanxi, China; 2.Xinmou New Technique Corporation General Director, S.J.Z. Development Areas, Shijiazhuang 050091, Hebei, China |
| |
| Abstract: | Nano-WC powders were produced with tungsten hexachloride and hydrogen and ethine by using radio-frequency plasma chemical vapor deposition method(RF-PCVD).Morphology of the powder is studied by HRTEM;phase compositions of the products are analyzed by XRD.The measured results show that the form of the powders have three phases of WC、W2C and WC1-X in coexistence.The particle is approximately global including some prismy and the particle size is in the range of 50-100nm,the average particle size is 70nm.It is concluded that nano WC powders can prepared by using RF-PCVD,and the product is phases coexistence of WC、W2C and WC1-X because of complicated eutectic of the W-C system. |
| |
| Keywords: | radio-frequency plasma chemical vapor deposition nano-powder tungsten hexachloride |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
