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TC4钛合金表面磁控溅射TiAlN涂层的组织与性能
引用本文:潘晓龙,刘啸锋,王少鹏.TC4钛合金表面磁控溅射TiAlN涂层的组织与性能[J].钛工业进展,2013(5):31-34.
作者姓名:潘晓龙  刘啸锋  王少鹏
作者单位:西北有色金属研究院,陕西 西安,710016
摘    要:采用TiAl合金靶材,在TC4钛合金基材表面以不同磁控溅射工艺沉积制备了TiAlN涂层。利用扫描电子显微镜(SEM)、能谱仪(EDS)、X射线衍射仪(XRD)分别分析了不同工艺制备的TiAlN涂层的表面形貌、表面成分及相结构,并对TiAlN涂层的耐蚀性、耐磨性等进行了研究。结果表明,采用磁控溅射工艺可在TC4钛合金表面制备出表面相对平整且结构致密的TiAlN涂层;沉积了TiAlN涂层的TC4钛合金试样的表面性能得到了提高,其磨损失重量和TC4钛合金基材相比降低了80%,耐盐雾腐蚀性能达到了保护级9级。

关 键 词:TC4钛合金  TiAlN涂层  磁控溅射  耐蚀性  耐磨性

Microstructure and Properties of TiAlN Coating Prepared by Magnetron Sputtering on Titanium Alloy
Authors:Pan Xiaolong  Liu Xiaofeng  Wang Shaopeng
Affiliation:( Northwest Institute for Nonferrous Metal Research, Xi' an 710016, China)
Abstract:TiAlN coating was deposited on TC4 titanium alloy by magnetron sputtering technique, using TiAl alloy target. Scanning electron microscope (SEM) and energy dispersing spectrum (EDS) and X-ray diffraction (XRD) were employed to analyze the surface morphology, compositions and phase structure of TiAlN coating samples. Corrosion resisting property and wear-resisting property of TiAlN coating samples were analyzed, too. The results show that the TiAlN coating has smooth surface and compact structure. The corrosion resisting property and wear-resisting property of TC4 are considerably improved by TiAlN coating. The wear weightlessness was reduced by 80% , salt fog corrosion resistance levels to protection grade 9.
Keywords:TC4 alloy  TiAlN coating  magnetron sputtering  corrosion resisting property  wear-resisting property
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