| 不同锻造变形量对管状溅射靶材晶粒组织的影响 |
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| 引用本文： | 李晶,王锦,安耿,张常乐,刘仁智.不同锻造变形量对管状溅射靶材晶粒组织的影响[J].中国钼业,2012(4):48-51. |
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| 作者姓名： | 李晶 王锦 安耿 张常乐 刘仁智 |
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| 作者单位： | 金堆城钼业股份有限公司技术中心 |
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| 摘 要： | 选用常规钼粉作为原料,采用锻造加工方式加工出一定规格的管状溅射靶材,在不同退火温度下观察晶粒组织,得出变形量为80%、1 100℃工艺下加工出的溅射靶材晶粒大小均匀,组织性能较好,符合溅射靶材对晶粒度的要求。
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| 关 键 词： | 钼溅射靶 管状 组织 晶粒 |
THE EFFECT OF THE GRAIN STRUCTURE ON FORGING DEFORMATION OF THE TUBULAR SPUTTERING TARGET |
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| LI Jing,WANG Jin,AN Geng,ZHANG Chang-le,LIU Ren-zhi.THE EFFECT OF THE GRAIN STRUCTURE ON FORGING DEFORMATION OF THE TUBULAR SPUTTERING TARGET[J].China Molybdenum Industry,2012(4):48-51. |
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| Authors: | LI Jing WANG Jin AN Geng ZHANG Chang-le LIU Ren-zhi |
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| Affiliation: | (Technology Center,Jinduicheng Molybdenum Group Co.,Ltd.,Xi’an 710077,Shaanxi,China) |
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| Abstract: | Using conventional molybdenum powder as a raw material,tubular sputtering target with certain specifications was processed by forging.Observing grain structure in the different annealing temperatures,it is obtained that uniform grain size can be gotten with deformation 80%,1 100 ℃,and the microstructure and properties are in line with the requirement of the sputtering targets on grain size. |
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| Keywords: | molybdenum sputtering target tubular microstructure grain size |
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