大功率陶瓷发射管栅极用TZM薄板工艺研究

进行了烧结、轧制工艺对比试验，研究了合金粉末粒度、烧结温度、中间热处理工艺对TZM合金微观组织、性能以及轧制过程的影响，探讨了影响大功率陶瓷发射管用TZM薄板表面质量的主要因素。结果表明：减小TiH2和ZrH2粉末粒度和适当提高烧结温度，可生产适合轧制TZM薄板的板坯，在后续冷轧过程中可明显减少起皮缺陷的产生；TZM烧结板坯于1350—1450℃开坯可保证轧制正常进行；轧制总加工率达到70％，板材厚度约8mm时，进行1550℃退火处理，可避免后续冷轧过程中分层现象的产生；按上述工艺生产的大功率陶瓷发射管栅极用TZM薄板室温和高温力学性能满足要求。

RESEARCH ON PROCESS TECHNOLOGY OF TZM ALLOY SHEET TO PRODUCE HIGH-POWER CERAMIC TUBE GRID

The sintering and rolling comparison tests of TZM alloy have been carried out. The influences of the alloy powder size, sintering temperature and intermediate heat treatment technology on TZM alloy microstructure, properties and rolling process have been studied in this article. The main factors affecting surface quality of TZM alloy sheet to produce high- power ceramic tube grid have been analyzed in this article. The results show that the high quality TZM sintering billets for rolling sheet can be obtained by reducing the particle sizes of Till2 ＆ ZrH2 powder and properly raising sintering temperature, also most of the peeling defects can be avoided in the cold rolling process . The favorable hot - rolling blooming temperatures for TZM sintering billets is 1 350 - 1 450 ℃. The lamination defects in the cold rolling process can be efficiently prevented if 1 550 ℃ recrystallization annealing is carried out when amount of deformation reaches 70%, in other words, the thickness of TZM plate is about 8mm. TZM sheets produced in accordance with the above process meet the requirements of high -power ceramic tube grid in the aspect of the room temperature and high temperature mechanical properties.