| 现代扫描电镜的发展及其在材料科学中的应用 |
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| 引用本文： | 吴立新,陈方玉.现代扫描电镜的发展及其在材料科学中的应用[J].武钢技术,2005,43(6):36-40. |
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| 作者姓名： | 吴立新 陈方玉 |
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| 作者单位： | 武钢技术中心,湖北,武汉,430080 |
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| 摘 要： | 介绍了扫描电子显微镜的工作原理和特点,特别是近几年发展起来的环境扫描电镜(ES-EM)及其附带分析部件如能谱仪、EBSD装置等的原理、特点和功能,并结合钢铁材料研究展望了其应用前景。
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| 关 键 词： | 环境扫描电镜 能谱仪 EBSD装置 |
| 文章编号： | 1008-4371（2005）06-0036-05 |
| 收稿时间： | 2005-08-02 |
| 修稿时间： | 2005-08-02 |
Development of Modern SEM and its Application in Material Science |
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| WU Li-xin,CHEN Fang-yu.Development of Modern SEM and its Application in Material Science[J].Wisco Technology,2005,43(6):36-40. |
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| Authors: | WU Li-xin CHEN Fang-yu |
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| Affiliation: | The Technology Center of WISCO, Wuhan 430080, China |
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| Abstract: | The present paper introduces the basic principle and characteristics of the Scanning Electron Microscope,especially of the Environmental SEM and its accessories such as EDS and EBSD etc.,and also discusses the application of the modern SEM in the material science. |
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| Keywords: | environmental SEM energy dispersive X-ray spectrometry electron backscatter diffraction |
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