Effects of oxygen pressure on La_3Ga_5SiO_(14) thin films grown by pulsed laser deposition |
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| Authors: | ZHANG Wen ; WANG Jiyang ; JI Zhenguo ; LI Hongxia ; LOU Yao ; YAO Shuhua |
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| Affiliation: | [1]State Key Laboratory of Crystal Materials [2]Shandong University [3]Institute of Electronic Information [4]Hangzhou Dianzi University [5]The MOE Key Laboratory of the Mechanical Manufacture and Automation [6]Zhejiang University of Technology |
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| Abstract: | La3Ga5SiO14 thin films were grown on Si(100) substrates by pulsed laser deposition at several oxygen pressures(5,10,and 20 Pa).The effects of oxygen pressure on the structural and morphological characteristics of the films were investigated using X-ray diffraction,atomic force microscopy,and scanning electron microscopy.X-ray diffraction results showed the intensity of lines from crystallites oriented along the(300) and(220) planes increased as the oxygen pressure was increased to 20 Pa.The deposited films ... |
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