| 化学气相沉积层的技术和应用 |
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| 引用本文： | 阎洪.化学气相沉积层的技术和应用[J].稀有金属与硬质合金,1999(1):57-62. |
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| 作者姓名： | 阎洪 |
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| 作者单位： | 昆明冶金研究院金属材料研究室 |
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| 摘 要： | 介绍了国内外化学气相沉积技术的研究进展，对化学气相沉积层的类型、性能和应用进行了详细的介绍，并展望了化学气相沉积法的发展趋势。
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| 关 键 词： | 化学气相沉积层 技术 应用 |
The Technology and Applications of Chemical Vapour Deposition |
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| Yan Hong.The Technology and Applications of Chemical Vapour Deposition[J].Rare Metals and Cemented Carbides,1999(1):57-62. |
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| Authors: | Yan Hong |
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| Affiliation: | Kunming Research Institute of Metallurgy |
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| Abstract: | This paper introduces research progress of chemical vapour deposition. The types, characteristics and applications of chemical vapour deposition are described in detail. And development trend of chemical vapour deposition is predicted. |
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| Keywords: | chemical vapour deposition technology application |
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