Preparation of (110)-oriented SrTiO3 film on quartz glass by laser chemical vapor deposition |
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| Authors: | Pei Zhao Qiong Zhang Wei Wu Takashi Goto Junxia Yu |
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| Affiliation: | 1. Hubei Key Laboratory of Plasma Chemistry and Advanced Materials, School of Material Science and Engineering, Wuhan Institute of Technology, Wuhan, China;2. Institute for Materials Research, Tohoku University, Sendai, Japan;3. School of Chemistry and Enviromental Engineering, Wuhan Institute of Technology, Wuhan, China |
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| Abstract: | SrTiO3 (STO) film was prepared on quartz glass by laser chemical vapor deposition at a deposition temperature (Tdep) ranged from 760 to 1104 K. Effect of the Tdep on the orientation, crystallinity, texture, and microstructure of the STO film was investigated. As the Tdep was increased, the preferred orientation of the STO film tended to be (110)-orientated with corresponding texture coefficient (TC) on the (110) reflection enhanced from 2.3 to 6; meanwhile, the full width at half maximum of the ω-scan on the (110) reflection decreased from 0.85° to 0.59°. The (110)-oriented grains were in wedge shape about 60 × 150 nm in size, which tended to be flat at an elevated Tdep of 1104 K. |
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| Keywords: | (110) preferred orientation laser chemical vapor deposition SrTiO3 film |
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