Properties of SiO2 thin films prepared by anodic oxidation under UV illumination and rapid photothermal processing |
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Authors: | ST Shishiyanu OI Lupan TS Shishiyanu VP ?ontea SK Railean |
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Affiliation: | Department of Microelectronics and Semiconductor Devices, Technical University of Moldova bd. ?tefan cel Mare 168, Chi?inau MD2004, Moldova |
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Abstract: | Anodic oxidation under ultraviolet (UV) illumination and rapid photothermal processing technique used for high quality oxide preparation in terms of device surface passivation and gate or tunnel dielectrics are reported. A number of samples of SiO2 thin films were prepared using this technique. It is shown that anodic oxidation under UV illumination followed by rapid photothermal processing (450 °C, 15 s) in the inert ambient yields the best optimization of the SiO2 thin films properties. Avoiding high temperature process should result in a better performance of the semiconductor devices. Anodic oxidation under UV illumination at low temperature and post-oxidation photothermal processing can be a possible alternative to the furnace growth silicon oxide; not only because of the low temperature process, but also because this technology essential improves the oxides properties. |
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Keywords: | Anodic oxidation Silicon oxide Ultraviolet (UV) illumination Rapid photothermal processing MOS structures |
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