Side wall anodization of aluminum thin film on silicon substrate |
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Authors: | Kyungtae Kim Moonjung Kim Sung Min Cho |
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Affiliation: | (1) Department of Chemical Engineering, Sungkyunkwan University, 440-746 Suwon, Korea |
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Abstract: | Anodization of aluminum with restricted surface areas is reported in this study. Particularly, the side wall of aluminum thin
film is anodized for the purpose of obtaining the confined number of pores with high aspect ratio. It has been observed that
side wall anodization does not occur uniformly since the anodization speed is not uniform at the both interfaces and in the
middle of the film. For this reason, the resultant pore front profile shows a parabolic shape, which resembles the parabolic
velocity profile of fluid flow through two slabs. During the anodization process, the pores tend to break apart and the structure
becomes more complex. Side wall anodization is investigated at various applied voltages and the resultant pore structures
are shown. |
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Keywords: | Anodized Aluminum Oxide (AAO) Aluminum Anodization Electropolishing |
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