Effect of neodymium substitution on crystalline orientation,microstructure and electric properties of sol-gel derived PZT thin films |
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| Authors: | Qi Li Xing Wang Fuan Wang Da Chen Xiaolei Xiao Helin Zou |
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| Affiliation: | 1. Key Laboratory for Micro/Nano Technology and Systems of Liaoning Province, Dalian University of Technology, Dalian 116024, People''s Republic of China;2. Key Laboratory for Precision and Non-Traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116024, People''s Republic of China |
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| Abstract: | Pb(NdxZr0.52Ti0.48)O3 (PNZT) (x = 0%, 1%, 2%, 3%, 4%, 5%) thin films were prepared by sol-gel process to investigate the effects of neodymium substitution on crystalline orientation, microstructure and electric properties of lead zirconate titanate (PZT) films. X-ray diffraction (XRD) and scanning electron microscope (SEM) analysis showed that PNZT films with Nd doping concentration below 3% exhibited dense perovskite structure with (100) preferred orientation. The average grain size of PNZT films decreased as the Nd substitution increased. The maximum dielectric constant, remnant polarization and minimum coercive field were obtained in 2% Nd-doped PZT films. Fatigue resistance was also improved significantly with 2% Nd dopant. |
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| Keywords: | PNZT thin films (100) preferred orientation Microstructure Electric properties Sol-gel process |
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