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Interface structure and deformation mechanisms of AlN/GaN multilayers |
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| Affiliation: | 1. Laboratory for Precision and Nano Processing Technologies, School of Mechanical and Manufacturing Engineering, University of New South Wales, NSW 2052, Australia;2. Electron Microscope Unit, University of New South Wales, Sydney 2052, Australia |
| Abstract: | |
| Keywords: | Interface structure Deformation mechanisms AlN/GaN multilayer Molecular dynamics |
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