Direct and controlled device integration of graphene oxide on Quartz Crystal Microbalance via electrospray deposition for stable humidity sensing

Integration of advanced and functional materials onto conventional sensing platforms can improve the device performances and even discover new applications. For piezoelectric resonant sensors, an addition of sensing materials can induce damping and hinder a stable device operation. Hence, the development of efficient method for materials integration is important to ensure high-performance and reliable sensor operation. This work presents a direct and precisely controlled integration of graphene oxide (GO) using the electrospray deposition (ESD) onto a 10 MHz Quartz Crystal Microbalance (QCM) for humidity sensing. The proposed ESD method achieves a high mass resolution of a few nanograms. Moreover, the GO uniformly coats across the sensing electrode region as it acts as a ground electrode during ESD. The proposed ESD method also works for a wide range of nanomaterials, such as carbon nanotubes, tin oxide, and silicon carbide micro-and nano-powders. Compared to the conventional drop-casting and dip coating approaches, our method ensures minimal GO agglomeration, resulting in a stable QCM-oscillator operation in a wide range of relative humidity from 11% to 97%. The measurement sensitivity increases with an amount of GO, but less GO results in better noise and detection limit performances. The results shed light on the importance of selecting an optimal amount of sensing materials for stable sensor operations.